PMN translator and linearization system in scanning probe micros

Details PMN translator and linearization system in scanning probe micros PMN translator and linearization system in scanning probe micros

1992-08-13

1993-04-06

Hannaher, Constantine

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250311, G01N 2300

Patent

active

052006174

ABSTRACT:
A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer PMN translator arrangement including three PMN posts, with first ends of the PMN posts connected to the base. A first end of the inner piezoelectric tube is rigidly connected to second ends of the PMN posts. Inner quadrant conductors are disposed on the inner surfaces of the inner piezoelectric tube, and outer quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube. Separate x and y scan control voltage signals are applied to corresponding opposed quadrant conductors of the inner piezoelectric tube to control scanning of the free end of the inner tube in the x and y directions. A z scan control voltage is produced by a servo control circuit in response to a probe signal and applied to the PMN posts, which have negligible hysteresis. The servo control circuit refers to a look-up table to correct non-linearities of the PMN posts.

REFERENCES:
patent: 4435666 (1984-03-01), Fukui et al.
patent: 4841148 (1989-06-01), Lyding
patent: 4945235 (1990-07-01), Nishioka et al.
patent: 5051646 (1991-09-01), Elings et al.
patent: 5103094 (1992-04-01), Hayes et al.

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