Platinum lift-off process

Details Platinum lift-off process Platinum lift-off process

1992-09-18

1993-09-07

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

437203, 437189, 437235, B44C 122

Patent

active

052425347

ABSTRACT:
A method for generating platinum features on the surface of a substrate is disclosed. The method provides an inexpensive means for constructing small platinum features. The method utilizes a photoresist mask to define the platinum features. The problems associated with residue from the deposition of the photoresist mask are overcome by utilizing an etching step which removes any such residue. The etching step also allows the platinum features to be recessed into the substrate surface.

REFERENCES:
patent: 3669730 (1972-06-01), Lepselter
patent: 3993515 (1976-11-01), Reichert
patent: 4078963 (1978-03-01), Symersky
patent: 4087315 (1978-05-01), Auracher et al.
patent: 4339305 (1982-07-01), Jones
patent: 4391849 (1983-07-01), Bischoff
patent: 4533431 (1985-08-01), Dargent
patent: 4584761 (1986-04-01), Wu
patent: 4662989 (1987-05-01), Casey et al.
patent: 4789645 (1988-12-01), Calviello et al.
patent: 5072520 (1991-12-01), Nelson

Affiliated with

Also associated with

Rating

Platinum lift-off process does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Platinum lift-off process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Platinum lift-off process will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-484765