Abrading – Machine – Reciprocating tool
Reexamination Certificate
2005-10-04
2005-10-04
Nguyen, George (Department: 3723)
Abrading
Machine
Reciprocating tool
C451S297000, C451S303000, C451S311000
Reexamination Certificate
active
06951511
ABSTRACT:
Generally, a method and apparatus for supporting a web of polishing material. In one embodiment, the apparatus includes a platen adapted to support the web, a frame assembly, and one or more flexures coupled between the platen and the frame assembly. The flexure allows the frame assembly to be moved in relation to the platen. When the frame assembly is in an extended position relative to the platen, the web is placed in a spaced-apart relation to the platen.
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Butterfield et al., “Platen With Web Release Apparatus,” U.S. Appl. No. 09/676,395 filed Sep. 29, 2000.
White, et al., “Web Left System for Chemical Mechanical Planarization,” U.S. Appl. No. 09/651,657 filed Aug. 29, 2000.
Rhine, et al., “Tilted Table on Chemical Mechanical Polishing System,” U.S. Appl. No. 09/640,502 filed Aug. 16, 2000.
Gurusamy Jayakumar
Hoey Gee Sun
Rosenberg Lawrence M.
Applied Materials Inc.
Moser Patterson & Sheridan
Nguyen George
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