Plasma treatment method

Details Plasma treatment method Plasma treatment method

2008-03-26

2009-06-23

Hassanzadeh, Parviz (Department: 1792)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C118S7230ER

Reexamination Certificate

active

07550180

ABSTRACT:
In a plasma treatment method of and apparatus for treating the surface of a treatment target substrate by utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means, a plurality of impedance regulation means for regulating impedances on the side of the reactor and on the side of the high-frequency power supply means are provided correspondingly to the impedances of a plurality of reactors, and the high-frequency power is supplied into the reactors via the impedance regulation means corresponding to the reactors. Plasma treatment can be made in a good efficiency and a low cost on a plurality of reactors having different impedances.

REFERENCES:
patent: 3968018 (1976-07-01), Lane et al.
patent: 4615298 (1986-10-01), Yamazaki
patent: 4972799 (1990-11-01), Misumi et al.
patent: 4981566 (1991-01-01), Wurczinger
patent: 5076205 (1991-12-01), Vowles et al.
patent: 5084125 (1992-01-01), Aoi
patent: 5116640 (1992-05-01), Mikami et al.
patent: 5288329 (1994-02-01), Nakamura et al.
patent: 5324360 (1994-06-01), Kozuka
patent: 5515986 (1996-05-01), Turlot et al.
patent: 5922134 (1999-07-01), Ohbuchi
patent: 5948166 (1999-09-01), David et al.
patent: 5968328 (1999-10-01), Teschner et al.
patent: 6017396 (2000-01-01), Okamoto
patent: 6145469 (2000-11-01), Teranishi et al.
patent: 6273955 (2001-08-01), Yoshino et al.
patent: 6300225 (2001-10-01), Okamura et al.
patent: 8-253862 (1996-10-01), None
patent: 9-310181 (1997-12-01), None
patent: 11-319546 (1999-11-01), None

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