Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1987-10-19
1989-01-03
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
118 501, 118623, 118728, 156345, 156646, 156657, 156662, 20419225, 20419237, 204298, 252 791, 427 38, H01L 21306, B44C 122, B05D 306, C23C 1400
Patent
active
047955295
ABSTRACT:
This invention relates to a plasma treating method and apparatus therefor. The plasma treating method comprises rendering a gas having a critical potential plasmic under a reduced pressure and changing an acceleration voltage for accelerating ions in the plasma towards a sample interposing the critical potential. The plasma treating apparatus comprises means for rendering a gas having a critical potential plasmic under a reduced pressure and means for changing an acceleration voltage for accelerating ions in the plasma towards a sample interposing the critical potential. According to the present invention, the etching step and the film formation step can be carried out alternately and the plasma treating time can be shortened.
REFERENCES:
patent: 4579623 (1986-04-01), Suzuki et al.
patent: 4622094 (1986-11-01), Otsubo
Hirobe Kado
Kakehi Yutaka
Kawahara Hironobu
Kawasaki Yoshinao
Kudo Katsuyoshi
Hitachi , Ltd.
Powell William A.
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