Plasma surface treatment system and plasma surface treatment...

Details Plasma surface treatment system and plasma surface treatment... Plasma surface treatment system and plasma surface treatment...

2006-02-21

2006-02-21

Wells, Nikita (Department: 2881)

Coating apparatus

Gas or vapor deposition

With treating means

C438S776000, C438S792000, C250S231120, C315S111210, C315S111010

Reexamination Certificate

active

07000565

ABSTRACT:
A plasma surface treatment system for irradiating a surface of a substrate to be treated with a nitrogen plasma excited by a high-frequency electric field to introduce nitrogen into the surface of the substrate comprises a pulse modulator for pulse modulation of the high-frequency electric field. By applying the high-frequency electric field in a pulsed form, it is possible to realize a nitriding by which the peak of nitrogen concentration is located at a shallower position and a desired nitrogen concentration can be obtained.

REFERENCES:
patent: 5580429 (1996-12-01), Chan et al.
patent: 6238512 (2001-05-01), Li et al.

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