Plasma surface treating method

Details Plasma surface treating method Plasma surface treating method

1991-05-31

1993-06-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118712, 118723, 118730, 118 501, 118620, 156643, 156655, 156345, 427535, B44C 122, B05D 306, B05D 1100

Patent

active

052214168

ABSTRACT:
In a plasma surface treating method, a sample to be treated is supported on a first electrode within a vacuum vessel and a second electrode is caused to confront the first electrode. Active species of negative ions are then generated by means of a direct current glow discharge produced in an abnormal glow discharge region and are subsequently impinged upon a surface of the sample to induce a chemical reaction with the sample.

REFERENCES:
patent: 5110405 (1992-05-01), Sawabe et al.

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