Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
Reexamination Certificate
2003-07-02
2008-09-02
Alejandro, Luz L. (Department: 1792)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With heating or cooling means for apparatus part other than...
C156S345480, C118S7230AN, C118S7230IR, C118S724000
Reexamination Certificate
active
07419566
ABSTRACT:
The plasma reactor comprises at least one cooling device (15, 16) consisting of two cooling elements (15a,15b;16a,16b) adapted to be separately switched on and off. The heat produced during the plasma treatment is dissipated by the cooling device. In doing so, cooling elements are connected or disconnected in order to enlarge or reduce the effective cooling surface. The cooling elements (15a,15b;16a,16b) are arranged in an interlaced manner so that local cooling peaks are avoided and, on the whole, an approximately uniform cooling sets in.
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Alejandro Luz L.
Diller Ramik & Wight
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