Plasma radiation source, method of forming plasma radiation,...

Details Plasma radiation source, method of forming plasma radiation,... Plasma radiation source, method of forming plasma radiation,...

2006-12-14

2010-11-23

Berman, Jack I (Department: 2881)

Radiant energy

Radiant energy generation and sources

C250S50400H, C313S153000, C313S620000, C313S621000, C315S111010, C315S111410, C315S111710

Reexamination Certificate

active

07838853

ABSTRACT:
A patterned beam of radiation is projected onto a substrate. A reflective optical element is used to help form the radiation beam from radiation emitted from a plasma region of a plasma source. In the plasma source, a plasma current is generated in the plasma region. To reduce damage to the reflective optical element, a magnetic field is applied in the plasma region with at least a component directed along a direction of the plasma current. This axial magnetic field helps limit the collapse of the Z-pinch region of the plasma. By limiting the collapse, the number of fast ions emitted may be reduced.

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Written Opinion for International Application No. PCT/NL2007/050652 dated Jun. 16, 2009.

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