Plasma processing system and baffle assembly for use in...

Details Plasma processing system and baffle assembly for use in... Plasma processing system and baffle assembly for use in...

2005-01-11

2009-10-13

Cleveland, Michael (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C118S715000

Reexamination Certificate

active

07601242

ABSTRACT:
The present invention presents a baffle assembly located in a plasma processing system, comprising a baffle carrier attached to the plasma processing system, and at least two baffle inserts having a plurality of passages therethrough, the at least two baffle inserts being supported by the baffle carrier.

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