Plasma processing system

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C702S060000, C702S107000, C324S601000

Reexamination Certificate

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07489145

ABSTRACT:
A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.

REFERENCES:
patent: 4356458 (1982-10-01), Armitage
patent: 6449568 (2002-09-01), Gerrish
patent: 6708123 (2004-03-01), Gerrish
patent: 6958612 (2005-10-01), Sakayori
patent: 2004/0199350 (2004-10-01), Blackham et al.
patent: 2005/0234662 (2005-10-01), Niedzwiecki et al.
patent: 10-185960 (1998-07-01), None
Hewlett Packard HP 8753E RF Vector Network Analyzer Technical Specifications, Copyright 1998, Hewlett-Packard Company, printed Feb. 1998.

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