4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Shigeki Amadatsu

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Microwave plasma generator

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Multi-sectional plasma generator with discharge gaps between...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Plasma processing apparatus for radiating microwave from rectang

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Plasma processing system

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1989277

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