Plasma processing apparatus for generating uniform strip-shaped

Details Plasma processing apparatus for generating uniform strip-shaped Plasma processing apparatus for generating uniform strip-shaped

1993-02-12

1994-05-24

Kwon, John T.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

333 99PL, 118719, H01J 724

Patent

active

053152123

ABSTRACT:
In a plasma processing apparatus including a plasma chamber having a strip-shaped rectangular window having a longitudinal length formed in a side wall of the plasma chamber, an object to be processed is provided within the plasma chamber so as to be close to the window. The plasma processing apparatus includes a coupling rectangular waveguide having a strip-shaped rectangular slit formed in an E-plane thereof so as to extend in a direction of an axis thereof, wherein the coupling rectangular waveguide is provided so that the direction of the axis of the coupling rectangular waveguide is parallel to the longitudinal direction of the window of the plasma chamber. A coupling member made of a material for propagating a microwave is mounted between the slit of the coupling rectangular waveguide and the window of the plasma chamber, and electromagnetically couples the slit with the window in an airtight state. Further, a microwave generating unit is connected to the coupling rectangular waveguide to generate and supply a microwave into the coupling rectangular waveguide, thereby propagating the microwave through the slit of the coupling rectangular waveguide, the coupling member and the window of the plasma chamber into the plasma chamber.

REFERENCES:
patent: 4430138 (1984-02-01), Suzuki et al.
patent: 4512868 (1985-04-01), Fujimura et al.
patent: 4641060 (1987-02-01), Dandl
patent: 4776918 (1988-10-01), Otsubo et al.
patent: 5002793 (1991-03-01), Arai
patent: 5107170 (1992-04-01), Ishikawa et al.
patent: 5182495 (1993-01-01), Fukuda et al.

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