Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2006-04-25
2006-04-25
Zervigon, Rudy (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S724000, C118S728000, C118S729000, C118S7230ER, C156S345430, C156S345510, C156S345520, C156S345530, C156S345540
Reexamination Certificate
active
07033444
ABSTRACT:
An electrode structure used in a plasma processing apparatus which performs a predetermined process on an object (W) to be processed by using a plasma in a process chamber (26) in which a vacuum can be formed. An electrode unit (38) has a heater unit (44) therein. A cooling block (40) having a cooling jacket (58) is joined to the electrode unit (38) so as to cool the electrode unit. A heat resistant metal seal member (66A,66B) seals an electrode-side heat transfer space (62, 64) formed between the electrode unit and the cooling block. Electrode-side heat transfer gas supply means (94) supplies a heat transfer gas to the electrode-side heat transfer space. Accordingly, a sealing characteristic of the electrode-side heat transfer space does not deteriorate even in a high temperature range such as a temperature higher than 200° C. and, for example, a range from 350° C. to 500° C., and the heat transfer gas does not leak.
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Amano Hideaki
Komino Mitsuaki
Sasaki Yasuharu
Tsuboi Kyo
Pillsbury & Winthrop LLP
Tokyo Electron Limited
Zervigon Rudy
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