Plasma processing apparatus

Details Plasma processing apparatus Plasma processing apparatus

2005-10-11

2005-10-11

Walberg, Teresa J. (Department: 3753)

Electric heating

Metal heating

By arc

Reexamination Certificate

active

06953908

ABSTRACT:
A plasma processing apparatus, comprising: at least, a plasma processing chamber for processing therein an object to be processed; antenna means for guiding microwaves into the plasma processing chamber; and a dielectric member disposed between the antenna means and the plasma processing chamber; wherein a surface of the dielectric member facing the inside of the plasma processing chamber has a projecting shape.

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