Plasma process for removing excess molding material from a...

Details Plasma process for removing excess molding material from a... Plasma process for removing excess molding material from a...

2004-12-22

2010-11-30

Olsen, Allan (Department: 1716)

Plastic and nonmetallic article shaping or treating: processes

Laser ablative shaping or piercing

C216S067000, C257SE21502

Reexamination Certificate

active

07842223

ABSTRACT:
A method for removing thin layers of a two-component molding material from areas on a substrate. The method includes using a plasma formed using a first gas mixture for removing one component of the molding material and a plasma formed using a different second gas mixture for removing the other component of the molding material. For filled epoxies commonly used as molding materials, the first gas mixture may be an oxygen-rich mixture of an oxygen-containing gas species and a fluorine-containing gas species, and the second gas mixture may be a fluorine-rich mixture of the same gases.

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