Plasma probe systems

Details Plasma probe systems Plasma probe systems

2007-07-24

2007-07-24

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB, C438S017000

Reexamination Certificate

active

11190527

ABSTRACT:
A plasma probe system includes a plasma probe, at least one meter, and a diagnostic apparatus. The probe may include a substrate having substantially the same properties as those of a substrate to be processed, a bottom electrode layer located over the substrate and electrically isolated therefrom, a dielectric layer positioned over the bottom electrode layer including apertures through which one or more electrodes of the bottom electrode layer are exposed, and at least one upper electrode layer that is electrically isolated from the bottom electrode layer by way of the dielectric layer. Electrodes of the bottom and upper electrode layers communicate with meters which may provide real-time data representative of one or more properties of a region of a plasma to which the electrodes are exposed.

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