Plasma generators

Details Plasma generators Plasma generators

1988-08-15

1990-12-25

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511101, 31511141, 31323131, H01J 724

Patent

active

049806106

ABSTRACT:
A plasma generator utilizing two magnetrons preferably acting out of phase with each other and each comprising one part of the other magnetic mirror. There may be included a thermal fragmenter to produce gas atoms directly into the plasma for ionization before being drawn onto a substrate. The use of a thermal fragmenter separate from the magnetrons produces ionized atoms directly where they are needed and allows quicker changeover to alternative atoms for multilayer coating.

REFERENCES:
patent: 3655508 (1972-04-01), Hirsch
patent: 3660715 (1972-05-01), Post
patent: 4479075 (1984-10-01), Elliott
patent: 4739170 (1988-04-01), Varga
I. K. Varga, "Multipurpose Plasma Generator Suitable for Diamondlike Carbon Film Formation", J. Vac. Sci., Technol. A.7 (4), Jul./Aug. 1989, pp. 2639-2645.

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