Plasma generator with field-enhancing electrodes

Details Plasma generator with field-enhancing electrodes Plasma generator with field-enhancing electrodes

1993-11-08

1995-05-23

Epps, Georgia Y.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511181, 31323131, H01J 724

Patent

active

054184304

ABSTRACT:
A microwave plasma generator including a chamber within which there is a pair of opposed field-enhancing electrodes one of which has an axial hole through which gas which has been activated into a plasma state in the region between the electrodes can be extracted from the chamber.

REFERENCES:
patent: 4782235 (1988-11-01), Lejeune et al.
patent: 4866346 (1989-09-01), Gaudreau et al.
patent: 4980610 (1990-12-01), Varga
patent: 5270616 (1993-12-01), Itatani
patent: 5276386 (1994-01-01), Watanabe et al.

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