Plasma generator with antennas attached to top electrodes

Details Plasma generator with antennas attached to top electrodes Plasma generator with antennas attached to top electrodes

1997-02-27

1998-11-17

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511141, 118723AN, H05H 146

Patent

active

058381112

ABSTRACT:
A plasma generator operable in the UHF and VHF bands is adaptable to process substrates having different sizes and shapes. The device includes a plurality of electrodes, a power supply for providing a high frequency signal to at least one of the electrodes, and antennas attached to the plurality of electrodes. Antennas on one electrode are arranged substantially parallel and alternately to antennas attached to another adjacent electrode.

REFERENCES:
patent: 4968918 (1990-11-01), Kondo et al.

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