Electric heating – Metal heating – By arc
Reexamination Certificate
2008-04-29
2011-10-11
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121400, C219S121480, C118S7230IR, C156S345480, C315S111510
Reexamination Certificate
active
08035056
ABSTRACT:
A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
REFERENCES:
patent: 5290382 (1994-03-01), Zarowin et al.
patent: 5435881 (1995-07-01), Ogle
patent: 5998933 (1999-12-01), Shun'ko
patent: 6150628 (2000-11-01), Smith et al.
patent: 6392351 (2002-05-01), Shun'ko
patent: 6418874 (2002-07-01), Cox et al.
patent: 6634313 (2003-10-01), Hanawa et al.
patent: 6755150 (2004-06-01), Lai et al.
patent: 6855906 (2005-02-01), Brailove
patent: 2003/0015965 (2003-01-01), Godyak
patent: 2004/0045506 (2004-03-01), Chen et al.
Hong Bo-Han
Kim Jae-Hyun
Kwon Gi-Chung
Lee Sang-Won
Lee Yong-Kwan
Jusung Engineering Co. Ltd.
Paschall Mark
Portland IP Law LLC
LandOfFree
Plasma generation apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Plasma generation apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma generation apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4267865