Plasma etching technique

Details Plasma etching technique Plasma etching technique

1981-12-30

1983-02-08

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156656, 1566591, 156665, 204192E, 252 791, C23F 102

Patent

active

043728065

ABSTRACT:
A method of improving the variable induction time encountered in the plasma etching of aluminum and similar metals comprising pretreatment by hydrogen glow discharge.

REFERENCES:
patent: 4148705 (1979-04-01), Battey et al.
patent: 4256534 (1981-03-01), Levinstein
Winkler et al., "The Role of Air Locks During Aluminum Plasma Etching," paper given at SEMI European Symposium on Materials and Processing, Zurich, Mar. 11-13, 1980.

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