Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1981-05-22
1983-12-20
Bernstein, Hiram H.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
136261, 136262, 427 39, C30B 2510
Patent
active
044215924
ABSTRACT:
Semiconductor thin films are produced using plasma assisted chemical vapor deposition on alkali halide single crystal substrates. Deposition is formed at relatively low temperatures so that sublimation of the substrate is not a problem. The invention process permits at high rate deposition of high quality semiconductors.
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Cowher Melvyn E.
Shuskus Alexander J.
Bernstein Hiram H.
Sohl Charles E.
United Technologies Corporation
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