Plasma display panel with a low K dielectric layer

Details Plasma display panel with a low K dielectric layer Plasma display panel with a low K dielectric layer

2006-10-17

2006-10-17

Patel, Ashok (Department: 2879)

Electric lamp and discharge devices

With gas or vapor

Three or more electrode discharge device

C313S587000

Reexamination Certificate

active

07122962

ABSTRACT:
A plasma display panel including a low k dielectric layer. In one embodiment, the dielectric layer is comprises a fluorine-doped silicon oxide layer such as an SiOF layer. In another embodiment, the dielectric layer comprises a Black Diamond™ layer. In certain embodiments, a capping layer such as SiN or SiON is deposited over the dielectric layer.

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