Plasma discharge device with dynamic tuning by a movable microwa

Details Plasma discharge device with dynamic tuning by a movable microwa Plasma discharge device with dynamic tuning by a movable microwa

1997-12-31

2000-05-02

Bettendorf, Justin P.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

156345, H01J 746

Patent

active

060576456

ABSTRACT:
A plasma discharge device and method for removing material from a substrate having dynamic tuning, which permits operation with a variety of process gasses over a range of operating conditions. A longitudinally extending microwave cavity is defined at the ends by microwave traps, the positions of which are longitudinally adjustable to provide dynamic tuning. An adjustable antenna is provided, and operation utilizes the TM.sub.012 mode.

REFERENCES:
patent: 3577207 (1971-05-01), Kirjushin
patent: 4207452 (1980-06-01), Arai
patent: 4507588 (1985-03-01), Asmussen
patent: 4611108 (1986-09-01), Leprince et al.
patent: 4630566 (1986-12-01), Asmussen et al.
patent: 4691662 (1987-09-01), Roppel et al.
patent: 4866346 (1989-09-01), Gandreau et al.
patent: 4943345 (1990-07-01), Asmussen et al.
patent: 5038713 (1991-08-01), Kawakami et al.
patent: 5063329 (1991-11-01), Okamoto
patent: 5069928 (1991-12-01), Echizen et al.
patent: 5078823 (1992-01-01), Chollet et al.
patent: 5082517 (1992-01-01), Moslehi
patent: 5201994 (1993-04-01), Nonaka et al.
patent: 5262610 (1993-11-01), Huang et al.
patent: 5389153 (1995-02-01), Paranjpe et al.
patent: 5489362 (1996-02-01), Steinhardt et al.
patent: 5498308 (1996-03-01), Kamarehi et al.

Affiliated with

Also associated with

Rating

Plasma discharge device with dynamic tuning by a movable microwa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Plasma discharge device with dynamic tuning by a movable microwa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma discharge device with dynamic tuning by a movable microwa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1596219