Plasma discharge apparatus with temperature sensing

Details Plasma discharge apparatus with temperature sensing Plasma discharge apparatus with temperature sensing

1989-08-30

1992-03-10

Laroche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

315115, 315117, 31323131, H01J 724

Patent

active

050952471

ABSTRACT:
A plasma discharge apparatus has a first electrode, a counter electrode, and a power source for supplying power to the first and counter electrodes for initiating and sustaining plasma discharge therebetween. An isolated heater is provided for heating only the first electrode. An isolated temperature sensor is provided for sensing the temperature of the first electrode, and a temperature controller is provided, responsive to the output of the temperature sensor, for controlling the heater to control the temperature of the first electrode.

REFERENCES:
patent: 4301391 (1981-11-01), Seliger et al.
patent: 4341947 (1982-07-01), Komura et al.
patent: 4479075 (1984-10-01), Elliot
patent: 4684848 (1987-08-01), Kaufman et al.
patent: 4740730 (1988-04-01), Uda et al.
patent: 4877999 (1989-10-01), Knapp et al.

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