Plasma-assisted doping

Details Plasma-assisted doping Plasma-assisted doping

2003-05-07

2009-02-24

Pizarro, Marcos D. (Department: 2891)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

C438S513000, C257SE21143

Reexamination Certificate

active

07494904

ABSTRACT:
Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various doping processes. In one embodiment, a substrate (250) can be doped by forming a plasma (610) in a cavity (285) by subjecting a gas to an amount of electromagnetic radiation in the presence of a plasma catalyst (240) and adding at least one dopant material to the plasma. The material is then allowed to penetrate into the substrate. Various active and passive catalysts are provided.

REFERENCES:
patent: 3432296 (1969-03-01), McKinnon et al.
patent: 3612686 (1971-10-01), Braman
patent: 3731047 (1973-05-01), Mullen et al.
patent: 4004934 (1977-01-01), Prochazka
patent: 4025818 (1977-05-01), Giguere
patent: 4090055 (1978-05-01), King
patent: 4147911 (1979-04-01), Nishitani
patent: 4151034 (1979-04-01), Yamamoto et al.
patent: 4213818 (1980-07-01), Lemons et al.
patent: 4230448 (1980-10-01), Ward et al.
patent: 4265730 (1981-05-01), Hirose et al.
patent: 4307277 (1981-12-01), Maeda et al.
patent: 4339326 (1982-07-01), Hirose et al.
patent: 4404456 (1983-09-01), Cann
patent: 4473736 (1984-09-01), Bloyet et al.
patent: 4479075 (1984-10-01), Elliott
patent: 4500564 (1985-02-01), Enomoto
patent: 4504007 (1985-03-01), Anderson, Jr.
patent: 4609808 (1986-09-01), Bloyet et al.
patent: 4611108 (1986-09-01), Leprince et al.
patent: 4624738 (1986-11-01), Westfall et al.
patent: 4664937 (1987-05-01), Ovshinsky et al.
patent: 4666775 (1987-05-01), Kim et al.
patent: 4687560 (1987-08-01), Tracy
patent: 4698234 (1987-10-01), Ovshinsky et al.
patent: 4760230 (1988-07-01), Hassler
patent: 4767902 (1988-08-01), Palaith
patent: 4772770 (1988-09-01), Matsui
patent: 4792348 (1988-12-01), Pekarsky
patent: 4840139 (1989-06-01), Takei
patent: 4871581 (1989-10-01), Yamazaki
patent: 4877589 (1989-10-01), O'Hare
patent: 4877938 (1989-10-01), Rau et al.
patent: 4883570 (1989-11-01), Efthimion et al.
patent: 4888088 (1989-12-01), Slomowitz
patent: 4891488 (1990-01-01), Davis
patent: 4897285 (1990-01-01), Wilhelm
patent: 4908492 (1990-03-01), Okamoto et al.
patent: 4919077 (1990-04-01), Oda
patent: 4924061 (1990-05-01), Labat
patent: 4946547 (1990-08-01), Palmour
patent: 4956590 (1990-09-01), Phillips
patent: 4963709 (1990-10-01), Kimrey
patent: 4972799 (1990-11-01), Misumi
patent: 5003125 (1991-03-01), Giusti
patent: 5003152 (1991-03-01), Matsuo et al.
patent: 5010220 (1991-04-01), Apte
patent: 5017404 (1991-05-01), Paquet
patent: 5023056 (1991-06-01), Aklufi
patent: 5058527 (1991-10-01), Ohta et al.
patent: 5072650 (1991-12-01), Phillips
patent: 5074112 (1991-12-01), Walton
patent: 5085885 (1992-02-01), Foley et al.
patent: 5087272 (1992-02-01), Nixdorf
patent: 5103715 (1992-04-01), Phillips
patent: 5120567 (1992-06-01), Frind et al.
patent: 5122633 (1992-06-01), Moshammer
patent: 5131993 (1992-07-01), Suib et al.
patent: 5164130 (1992-11-01), Holcombe
patent: 5202541 (1993-04-01), Patterson
patent: 5222448 (1993-06-01), Morgenthaler et al.
patent: 5223308 (1993-06-01), Doehler
patent: 5224117 (1993-06-01), Kruger et al.
patent: 5227695 (1993-07-01), Pelletier
patent: 5271963 (1993-12-01), Elchman et al.
patent: 5276297 (1994-01-01), Nara
patent: 5276386 (1994-01-01), Watanabe
patent: 5277773 (1994-01-01), Murphy
patent: 5284544 (1994-02-01), Mizutani et al.
patent: 5304766 (1994-04-01), Baudet et al.
patent: 5307892 (1994-05-01), Phillips
patent: 5310426 (1994-05-01), Mori
patent: 5311906 (1994-05-01), Phillips
patent: 5316043 (1994-05-01), Phillips
patent: 5321223 (1994-06-01), Kimrey
patent: 5349154 (1994-09-01), Harker et al.
patent: 5366764 (1994-11-01), Sunthankar
patent: 5370525 (1994-12-01), Godon
patent: 5423180 (1995-06-01), Nobue et al.
patent: 5435698 (1995-07-01), Phillips
patent: 5449887 (1995-09-01), Holcombe
patent: 5489550 (1996-02-01), Moslehi
patent: 5505275 (1996-04-01), Phillips
patent: 5514217 (1996-05-01), Niino
patent: 5520740 (1996-05-01), Kanai
patent: 5521360 (1996-05-01), Johnson et al.
patent: 5523126 (1996-06-01), Sano
patent: 5527391 (1996-06-01), Echizen et al.
patent: 5536477 (1996-07-01), Cha et al.
patent: 5597456 (1997-01-01), Maruyama et al.
patent: 5607509 (1997-03-01), Schumacher
patent: 5616373 (1997-04-01), Karner
patent: 5645897 (1997-07-01), Andra
patent: 5651825 (1997-07-01), Nakahigashi et al.
patent: 5662965 (1997-09-01), Deguchi
patent: 5670065 (1997-09-01), Bickmann
patent: 5671045 (1997-09-01), Woskov
patent: 5682745 (1997-11-01), Phillips
patent: 5689949 (1997-11-01), DeFreitas
patent: 5712000 (1998-01-01), Wei et al.
patent: 5714010 (1998-02-01), Matsuyama et al.
patent: 5715677 (1998-02-01), Wallman et al.
patent: 5734501 (1998-03-01), Smith
patent: 5735451 (1998-04-01), Mori
patent: 5741364 (1998-04-01), Kodama
patent: 5755097 (1998-05-01), Phillips
patent: 5794113 (1998-08-01), Munir et al.
patent: 5796080 (1998-08-01), Jennings
patent: 5808282 (1998-09-01), Apte
patent: 5828338 (1998-10-01), Gerstenberg
patent: 5841237 (1998-11-01), Alton
patent: 5847355 (1998-12-01), Barmatz et al.
patent: 5848348 (1998-12-01), Dennis
patent: 5859404 (1999-01-01), Wei
patent: 5868871 (1999-02-01), Yokose et al.
patent: 5874705 (1999-02-01), Duan
patent: 5904993 (1999-05-01), Takeuchi
patent: 5939026 (1999-08-01), Seki et al.
patent: 5945351 (1999-08-01), Mathuni
patent: 5961773 (1999-10-01), Ichimura et al.
patent: 5961871 (1999-10-01), Bible et al.
patent: 5973289 (1999-10-01), Read et al.
patent: 5976429 (1999-11-01), Chen
patent: 5980843 (1999-11-01), Silversand
patent: 5980999 (1999-11-01), Goto et al.
patent: 5989477 (1999-11-01), Berger
patent: 5993612 (1999-11-01), Rostaing et al.
patent: 5998774 (1999-12-01), Joines et al.
patent: 6011248 (2000-01-01), Dennis
patent: 6028393 (2000-02-01), Izu
patent: 6038854 (2000-03-01), Penetrante et al.
patent: 6054693 (2000-04-01), Barmatz et al.
patent: 6054700 (2000-04-01), Rokhvarger
patent: 6096389 (2000-08-01), Kanai
patent: 6101969 (2000-08-01), Niori
patent: 6103068 (2000-08-01), Merten et al.
patent: 6122912 (2000-09-01), Phillips
patent: 6131386 (2000-10-01), Trumble
patent: 6132550 (2000-10-01), Shiomi
patent: 6149985 (2000-11-01), Grace et al.
patent: 6152254 (2000-11-01), Phillips
patent: 6153868 (2000-11-01), Marzat
patent: 6183689 (2001-02-01), Roy et al.
patent: 6186090 (2001-02-01), Dotter
patent: 6189482 (2001-02-01), Zhao
patent: 6204606 (2001-03-01), Spence
patent: 6224836 (2001-05-01), Moisan et al.
patent: 6228773 (2001-05-01), Cox
patent: 6238629 (2001-05-01), Barankova et al.
patent: 6248206 (2001-06-01), Herchen et al.
patent: 6264812 (2001-07-01), Raaijmakers et al.
patent: 6284202 (2001-09-01), Cha et al.
patent: 6287980 (2001-09-01), Hanazaki et al.
patent: 6287988 (2001-09-01), Nagamine et al.
patent: 6297172 (2001-10-01), Kashiwagi
patent: 6297595 (2001-10-01), Stimson
patent: 6329628 (2001-12-01), Kuo
patent: 6342195 (2002-01-01), Roy et al.
patent: 6345497 (2002-02-01), Penetrante et al.
patent: 6348158 (2002-02-01), Samukawa
patent: 6358361 (2002-03-01), Matsumoto
patent: 6362449 (2002-03-01), Hadidi
patent: 6365885 (2002-04-01), Roy et al.
patent: 6367412 (2002-04-01), Ramaswamy et al.
patent: 6370459 (2002-04-01), Phillips
patent: 6372304 (2002-04-01), Sano et al.
patent: 6376027 (2002-04-01), Lee et al.
patent: 6383333 (2002-05-01), Haino et al.
patent: 6383576 (2002-05-01), Matsuyama
patent: 6388225 (2002-05-01), Blum et al.
patent: 6392350 (2002-05-01), Amano
patent: 6407359 (2002-06-01), Lagarde et al.
patent: 6488112 (2002-12-01), Kleist
patent: 6512216 (2003-01-01), Gedevanishvill et al.
patent: 6522055 (2003-02-01), Uemura et al.
patent: 6547979 (2003-04-01), Hineman et al.
patent: 6575264 (2003-06-01), Spadafora
patent: 6592664 (2003-07-01), Frey et al.
patent: 6610611 (2003-08-01), Liu et al.
patent: 6712298 (2004-03-01), Kohlberg et al.
patent: 6717368 (2004-04-01), Skamoto et al.
patent: 6870124 (2005-03-01), Kumar et al.
patent: 2001/0027023 (2001-10-01), Ishihara et al.
patent: 2001/0028919 (2001-10-01), Liu et al.
patent: 2002/0034461 (2002-03-01), Segal
patent: 2002/0036187 (2002-03-01), Ishll et al.
patent: 2002/0124867 (2002-09-01), Kim et al.
patent: 2002/0135308 (2002-09-01), J

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