Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1982-10-22
1985-03-19
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
310328, 269 58, 269 71, G21K 510
Patent
active
045061548
ABSTRACT:
A micropositioning stage is described which may be monolithic and which comprises a first structure which is mounted coplanar with and concentrically within a second structure. Both structures consist essentially of frames and pivoting lever arms which respond to linear force from piezoelectric transducers to move an object mounted on a platform in two different directions one of which may be at right angles to the other. The invention is particularly characterized by permitting biaxial movement of an object in a planar, essentially flat unit. In one embodiment, the present invention is monolithic in the sense that it is a single unitary structure except for the piezoelectric transducer elements.
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Single Page Description of the Two-Dimensional Piezoelectric Micropositioning Stage, Rev. Sci. Instrum.
Anderson Bruce C.
Brown James J.
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