Pivoting air lock for a treatment chamber

Details Pivoting air lock for a treatment chamber Pivoting air lock for a treatment chamber

1992-06-02

1993-04-27

Rivell, John

Valves and valve actuation

Valve head movably connected for accommodation to seat

With yieldable connection

251298, F16K 2500

Patent

active

052055329

ABSTRACT:
In a pivoting air lock for the entry and/or exit of a substrate from one treatment chamber into an adjacent one or from atmospheric space into a chamber of lesser pressure, especially a slot air lock for a pass-through vacuum coating apparatus, with a flap-like valve plate (2) held in stationary bearings (11, 11a) and two closing motors (10, 10a) in active connection with the valve plate, the valve plate (2) is, with the interposition of two spring rods (5, 5a), linked to a valve beam (1) which in turn has two diametrically opposite journals (12, 12a) which are coupled for rotation with the shafts (18, 18a) of the motors (10, 10a), the shafts (18, 18a) of the motors (10, 10a) being brought in a pressure-proof manner through the wall (13, 13a) of the chamber (3).

REFERENCES:
patent: 1656185 (1928-01-01), Enz
patent: 2247773 (1941-07-01), Dunn
patent: 2522732 (1950-09-01), Whitworth
patent: 2767738 (1956-10-01), Pottmeyer
patent: 2939616 (1960-06-01), Whittum et al.
patent: 3727880 (1973-04-01), Stock
patent: 3972504 (1976-08-01), DiSabatino, Jr. et al.

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