Pitch reduction integrating formation of memory array and...

Details Pitch reduction integrating formation of memory array and... Pitch reduction integrating formation of memory array and...

2007-08-14

2007-08-14

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

Chemical etching

C438S258000

Reexamination Certificate

active

11009496

ABSTRACT:
Methods and apparatus for providing a memory array fabrication process that concurrently forms memory array elements and peripheral circuitry. The invention relates to a method for fabricating memory arrays using a process that concurrently forms memory array elements and peripheral circuitry and results in a reduction in pitch.

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