Pitch by splitting bottom metallization layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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C257S736000, C257SE23019, C257S758000

Reexamination Certificate

active

07737554

ABSTRACT:
An integrated circuit structure includes a semiconductor substrate; a first bottom metallization (M1) layer over the semiconductor substrate; a second M1layer over the first M1layer, wherein metal lines in the first and the second M1layer have widths of greater than about a minimum feature size; and vias connecting the first and the second M1layers.

REFERENCES:
patent: 6239025 (2001-05-01), Bease et al.
patent: 7006370 (2006-02-01), Ramesh et al.
patent: 2004/0140569 (2004-07-01), Meguro et al.

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