X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1990-05-21
1993-03-23
Westin, Edward P.
X-ray or gamma ray systems or devices
Specific application
Lithography
378208, 2504911, 2504922, 414222, 414225, 414226, G21K 500
Patent
active
051970899
ABSTRACT:
A pin chuck holds a wafer during translation by an X-ray lithography machine. The chuck is designed to be the same size as the wafer and includes a plurality of extensions having tops along a common plane. The space between the extensions is evacuated to hold and level the wafer. In order to load or remove a wafer from the pin chuck, three extendable posts are provided which can be extended to permit a robot arm to position a wafer thereon for lowering to the pin chuck or remove a wafer therefrom lifted from the pin chuck. The three posts are triangularly positioned within a space sufficient to hold the wafer which at the same time close enough together to permit the fingers of the robot arm to fit therearound.
REFERENCES:
patent: 4335313 (1982-06-01), Kreuzer et al.
patent: 4475223 (1984-10-01), Taniguchi et al.
patent: 4516253 (1985-05-01), Novak
patent: 4584045 (1986-04-01), Richards
patent: 4735540 (1988-04-01), Allen et al.
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 4776745 (1988-10-01), Foley
patent: 4789294 (1988-12-01), Sato et al.
patent: 4806057 (1989-02-01), Cay et al.
patent: 4820930 (1989-04-01), Tsutsui et al.
patent: 4870668 (1989-09-01), Frankel et al.
patent: 4886412 (1989-12-01), Wooding et al.
patent: 4907931 (1990-03-01), Mallory et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4936329 (1990-06-01), Michael et al.
patent: 4969790 (1990-11-01), Petz et al.
patent: 4985722 (1991-01-01), Ushijima et al.
Barron Harry W.
Chu Kim Kwok
Hampshire Instruments, Inc.
Westin Edward P.
LandOfFree
Pin chuck for lithography system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pin chuck for lithography system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pin chuck for lithography system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1357853