Piezoresistive strain concentrator

Details Piezoresistive strain concentrator Piezoresistive strain concentrator

2008-07-01

2008-07-01

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

C073S754000

Reexamination Certificate

active

11338519

ABSTRACT:
A piezoresistive device is provided for sensing mechanical input and converts mechanical movement of at least two relatively movable parts into an electrical output. A silicon substrate is provided that is oriented in the (100) plane and has an n-type impurity. A gap extends across a portion of the substrate. The gap defines the at least two relatively moveable parts. A flexible cross-section connects the at least two relatively moveable parts. The cross-section is made of the same material as the substrate. At least one strain sensitive element is provided on a surface of the silicon substrate, is aligned in a [110] direction and includes a p-type impurity. The strain sensitive element has two end portions interconnected by an intermediate neck portion. The neck portion is supported on a structure that concentrates strain. The structure extends across the gap and has vertical walls that extend to the cross-section in the gap. The structure is made of the same material as the substrate. At least one electrode is electrically connected to the end portions. The at least one electrode detects changes in electrical resistance between the end portions when the neck portion is subjected to stress in a direction of a current through the strain sensitive element that results from the relative movement of the at least two relatively moveable parts.

REFERENCES:
patent: 3351880 (1967-11-01), Wilner
patent: 3501732 (1970-03-01), Wilner
patent: 3995247 (1976-11-01), Kurtz
patent: 4093933 (1978-06-01), Wilner
patent: 4498229 (1985-02-01), Wilner
patent: 4605919 (1986-08-01), Wilner
patent: 4737473 (1988-04-01), Wilner
patent: 4793194 (1988-12-01), Wilner
patent: 5313023 (1994-05-01), Johnson
patent: 5425841 (1995-06-01), Kurtz et al.
patent: 5526700 (1996-06-01), Akeel
patent: 5539236 (1996-07-01), Kurtz et al.
patent: 5756899 (1998-05-01), Ugai et al.
patent: 5773728 (1998-06-01), Tsukada et al.
patent: 6627965 (2003-09-01), Tuller et al.
patent: 6739199 (2004-05-01), Nikkel
patent: 6915702 (2005-07-01), Omura et al.
patent: 6988412 (2006-01-01), Wilner
patent: 7146865 (2006-12-01), Wilner
patent: 2003/0101828 (2003-06-01), Omura et al.
Krivorotov, N. P., “Diaphragmless Pressure Sensor”, Elsevier, Sensors and Actuators A 113, pp. 350-354 (2004).

Affiliated with

Also associated with

Rating

Piezoresistive strain concentrator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoresistive strain concentrator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoresistive strain concentrator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3914942