Piezoresistive accelerometer with enhanced performance

Details Piezoresistive accelerometer with enhanced performance Piezoresistive accelerometer with enhanced performance

1994-09-09

1996-07-23

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257417, 257418, 7351423, 7351434, 73DIG1, 73DIG4, H01L 2982

Patent

active

055392369

ABSTRACT:
An electromechanical transducer is provided, and the process for making it utilizes a piezoresistive element or gage which is dielectrically isolated from a gap spanning member and substrate upon which it is supported. The gage of the invention is a force gage and is derived from a sacrificial wafer by a series of etching and bonding steps which ultimately provide a gage with substantially reduced strain energy requirements.

REFERENCES:
patent: 3456226 (1969-07-01), Vick
patent: 3697918 (1972-10-01), Orth et al.
patent: 4696188 (1987-09-01), Higashi
patent: 5170237 (1992-12-01), Tsuda et al.

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