Piezoelectric thin-film resonator and filter

Details Piezoelectric thin-film resonator and filter Piezoelectric thin-film resonator and filter

2008-05-16

2010-06-15

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S192000, C310S320000

Reexamination Certificate

active

07737806

ABSTRACT:
A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.

REFERENCES:
patent: 6507983 (2003-01-01), Ruby et al.
patent: 6992420 (2006-01-01), Jang et al.
patent: 7187253 (2007-03-01), Sano et al.
patent: 7199683 (2007-04-01), Thalhammer et al.
patent: 7342351 (2008-03-01), Kubo et al.
patent: 2006/0091764 (2006-05-01), Tsutsumi et al.
patent: 2007/0096597 (2007-05-01), Taniguchi et al.
patent: 60-189307 (1985-09-01), None
patent: 2002-140075 (2002-05-01), None
patent: 2005-536908 (2005-12-01), None
patent: 2006-254295 (2006-09-01), None
patent: 1020070045945 (2007-05-01), None
Takeuchi et al., Stress Adjustment and Characteristics Improvement in a 1.8GHz Range Film Bulk Acoustic Wave Resonator by Using Multi-layer Structure of ZnO/Al2O3/SiO2, Fall 2002, Materials Research Society,Symposium J vol. 741 Paper J5.9, 7 pages.
Lee et al., Relationship between residual stress and structural properties of AlN films deposited by R.F. reactive sputtering, Jul. 2003, Elsevier Science B.V., vol. 435, 6 pages.
K. Nakamura, et al., “ZnO/SiO2-Diaphragm Composite Resonator on a Silicon Wafer”, Electronics Letters, Jul. 9, 1981, vol. 17, No. 14, pp. 507-509.

Affiliated with

Also associated with

Rating

Piezoelectric thin-film resonator and filter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric thin-film resonator and filter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin-film resonator and filter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4185977