Piezoelectric thin film device and method for manufacturing...

Details Piezoelectric thin film device and method for manufacturing... Piezoelectric thin film device and method for manufacturing...

2008-09-02

2008-09-02

San Martin, Jaydi A (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S331000, C310S332000, C310S365000, C200S181000

Reexamination Certificate

active

11946913

ABSTRACT:
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

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Rajan S. Naik, et al., “Measurements of the Bulk, C-Axis Electromechnical Coupling Constant as a Function of AIN Film Quality”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 47, No. 1, Jan. 2000, pp. 292-296.

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