Piezoelectric micropump with microvalves

Details Piezoelectric micropump with microvalves Piezoelectric micropump with microvalves

1988-02-04

1990-07-03

Hindenburg, Max

Surgery

Means for introducing or removing material from body for...

Treating material introduced into or removed from body...

222255, A61M 3100

Patent

active

049387421

ABSTRACT:
A silicon micropump which can be manufactured by established integrated circuit techniques, and which is provided with piezoelectric valves, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made in silicon and glass, while the valves contain piezoelectric material, which allows opening and closing of the valves by electrical means.

REFERENCES:
patent: 4207871 (1980-06-01), Jenkins
patent: 4411651 (1983-10-01), Schulman
patent: 4447224 (1984-05-01), Decant et al.
patent: 4474309 (1984-10-01), Solomon
patent: 4486190 (1984-12-01), Reinicke
patent: 4673391 (1987-06-01), Kondo et al.
patent: 4710177 (1987-12-01), Smith et al.
"An Electronically Controlled Piezoelectric Insulin Pump and Valves", Spencer et al., 1978 IEEE.

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