Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Inventor
active
Integrated micromechanical piezoelectric motor
Micro-beam tactile sensor for the measurement of vertical positi
Micro-beam tactile sensor for the measurement of vertical positi
Piezoelectric bimorphs as microelectromechanical building...
Piezoelectric micropump with microvalves
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Profile ID: LFUS-PAI-P-564460