Physical vapor deposition poly-p-phenylene sulfide film as a bot

Details Physical vapor deposition poly-p-phenylene sulfide film as a bot Physical vapor deposition poly-p-phenylene sulfide film as a bot

1998-06-11

2000-05-16

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

216 41, 430950, G03F 726

Patent

active

060635479

ABSTRACT:
A method of patterning conductive lines using a bottom anti-reflective coating (BARC) composed of Poly-p-phenylene sulfide (PPS) film 30 formed using a Physical Vapor Deposition (PVD) process. The PPS BARC 30 is easy to remove and has superior planarization. The method comprises:

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patent: 5545588 (1996-08-01), Yoo
Petty et al. "An Introduction to Molecular Electronics " . First Ed. London, 1995, pp. 244-245.

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