Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2006-08-17
2009-06-02
Vu, David (Department: 2818)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514260, C438S048000, C438S050000, C438S052000, C257S414000, C257S415000, C257S432000
Reexamination Certificate
active
07540192
ABSTRACT:
A method for manufacturing a physical quantity sensor having a movable portion, a support portion and an optical part is provided. The method includes steps of: etching a silicon substrate so that a movable-portion-to-be-formed portion, a support-portion-to-be-formed portion, and an optical-part-to-be-formed portion having a plurality of columns and trenches are formed; oxidizing the optical-part-to-be-formed portion so that each column changes to a silicon oxide column and the trench is filled with a silicon oxide layer; and removing a part of the movable-portion-to-be-formed portion connecting to the silicon substrate so that the movable portion is separated from the silicon substrate.
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Office Action dated Oct. 30, 2008 in corresponding German patent application No. 10 2006 041 995.2-52 (and English translation).
Oohara Junji
Takeuchi Yukihiro
DENSO CORPORATION
Fox Brandon
Posz Law Group , PLC
Vu David
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