Physical quantity sensor

Details Physical quantity sensor Physical quantity sensor

2007-09-18

2007-09-18

Estrada, Michelle (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S254000, C438S700000

Reexamination Certificate

active

11169583

ABSTRACT:
A physical quantity sensor includes: a semiconductor substrate; a cavity disposed in the substrate and extending in a horizontal direction of the substrate; a groove disposed on the substrate and reaching the cavity; a movable portion separated by the cavity and the groove so that the movable portion is movably supported on the substrate; and an insulation layer disposed on a bottom of the movable portion so that the insulation layer provides a roof of the cavity.

REFERENCES:
patent: 5455383 (1995-10-01), Tanaka
patent: 5661712 (1997-08-01), Chiba
patent: 5987989 (1999-11-01), Yamamoto et al.
patent: 6399516 (2002-06-01), Ayon
patent: 6756310 (2004-06-01), Kretschmann et al.
patent: 7105902 (2006-09-01), Asami et al.
patent: 2005/0112843 (2005-05-01), Fischer et al.

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