Physical quantity sensor

Details Physical quantity sensor Physical quantity sensor

2006-11-07

2006-11-07

Munson, Gene M. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S414000, C073S514320, C073S514340

Reexamination Certificate

active

07132722

ABSTRACT:
A physical quantity sensor is constituted using a plurality of piezoelectric sensors each having first and second semiconductor layers realizing resistances and terminals, and a conductive weight portion in relation to an opening of an insulating film that partially exposes the main surface of a substrate. Both the semiconductor layers are elongated from the periphery of the opening on the insulating film inwardly into the opening so as to three-dimensionally support the conductive weight portion in a floating manner, thus realizing three-dimensional displacement. A capacitance electrode layer is arranged in the bottom of the opening on the main surface of the substrate so as to establish capacitance with the conductive weight portion. The displacement of the conductive weight portion is detected based on resistance variations and capacitance variations. Thus, it is possible to detect physical quantity such as acceleration, vibration, and inclination with a reduced chip size.

REFERENCES:
patent: 5500549 (1996-03-01), Takeuchi et al.
patent: 5559290 (1996-09-01), Suzuki et al.
patent: 6192757 (2001-02-01), Tsang et al.
patent: 6285063 (2001-09-01), Splett et al.
patent: S62-174978 (1987-07-01), None

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