Physical nano-machining with a scanning probe system for...

Details Physical nano-machining with a scanning probe system for... Physical nano-machining with a scanning probe system for...

2007-02-27

2007-02-27

Geyer, Scott B. (Department: 2812)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C438S010000, C438S014000, C257SE21521

Reexamination Certificate

active

10848925

ABSTRACT:
Nano-machining for circuit edits through the front side or backside of an integrated circuit may be performed using a scanning probe system. The system may create access holes with smaller dimensions and facilitate nano-machining endpoint detection in some embodiments.

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