Photovoltaic element and fabrication process thereof

Details Photovoltaic element and fabrication process thereof Photovoltaic element and fabrication process thereof

1996-05-29

1998-02-24

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Panel or array

136258, 257440, 257458, 427574, 427575, 427578, 427579, 438 96, 438 97, 438482, 438484, 438485, H01L 31075, H01L 3120

Patent

active

057208263

ABSTRACT:
Provided are a photovoltaic element suitable for practical use, low in cost, high in reliability, and high in photoelectric conversion efficiency, and a fabrication process thereof. In the photovoltaic element having stacked layers of non-single-crystal semiconductors, at least an i-type semiconductor layer and a second conductivity type semiconductor layer are stacked on a first conductivity type semiconductor layer, and the second conduction type semiconductor layer has a layer A formed by exposing the surface of the i-type semiconductor layer to a plasma containing a valence electron controlling agent and a layer B deposited on the layer A by a CVD process using at least the valence electron controlling agent and the main constituent elements of the i-type semiconductor layer.

REFERENCES:
patent: 2949498 (1960-08-01), Jackson
patent: 4254429 (1981-03-01), Yamazaki
patent: 4377723 (1983-03-01), Dalal
patent: 4400409 (1983-08-01), Izu
patent: 4816082 (1989-03-01), Guha
patent: 5589007 (1996-12-01), Fujioka et al.

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