Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2007-02-27
2009-06-16
Lee, Sin J. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S313000, C430S315000, C430S319000, C430S320000, C430S321000, C430S322000, C430S323000, C430S324000, C430S325000, C430S326000, C430S327000, C430S331000, C430S270100, C430S005000, C556S420000, C556S422000
Reexamination Certificate
active
07547503
ABSTRACT:
Provided is a photosensitive silane coupling agent for forming a low-defect microparticle pattern, dot array pattern, or hole array pattern with a smaller number of process steps, and a method of forming a pattern using such photosensitive silane coupling agent. Used is a photosensitive silane coupling agent having a secondary amino group protected by an o-nitrobenzyloxycarbonyl group.
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Inao Yasuhisa
Ito Toshiki
Mizutani Natsuhiko
Yamaguchi Takako
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lee Sin J.
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