Photosensitive resin compositions

Radiation imagery chemistry: process – composition – or product th – Imaged product – Including resin or synthetic polymer

Reexamination Certificate

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Details

C430S270100, C430S325000, C430S330000, C430S905000

Reexamination Certificate

active

07129011

ABSTRACT:
A heat resistant negative working photosensitive composition that comprises(a) one or more polybenzoxazole precursor polymers (I): wherein x is an integer from about 10 to about 1000, y is an integer from 0 to about 900 and (x+y) is about less then 1000; Ar1is a tetravalent aromatic group, a tetravalent heterocyclic group, or mixtures thereof; Ar2is a divalent aromatic, a divalent heterocyclic, a divalent alicyclic, or a divalent aliphatic group that may contain silicon; Ar3is a divalent aromatic group, a divalent aliphatic group, a divalent heterocyclic group, or mixtures thereof; Ar4is Ar1(OH)2or Ar2; G is a monovalent organic group a carbonyl, carbonyloxy or sulfonyl group;(b) one or more photo-active compounds which release acid upon irradiation (PAGs);(c) one or more latent crosslinkers each of which contains at least two ˜N—(CH2OR)nunits (n=1 or 2, wherein R is a linear or branched C1–C8alkyl group);(d) at least one solvent, and(e) at least one dissolution rate modifier,with the proviso that when the latent crosslinker is highly reactive, the dissolution rate modifier does not contain carboxylic acid groups.

REFERENCES:
patent: 5486447 (1996-01-01), Hammerschmidt et al.
patent: 5760162 (1998-06-01), Sezi et al.
patent: 6183934 (2001-02-01), Kawamonzen
patent: 2004/0023147 (2004-02-01), Hirano et al.
patent: 2004/0229166 (2004-11-01), Rushkin et al.
patent: 11-153866 (1999-06-01), None
patent: 2001-125267 (2001-05-01), None
U.S. Appl. No. 60/453,869 (U.S. Appl. No. 10/795,577, U.S. Patent Pub 2004/0229166 A1).

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