Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-11-29
2010-12-14
Chu, John S (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S281100, C430S287100, C430S311000, C430S326000, C430S330000
Reexamination Certificate
active
07851128
ABSTRACT:
A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
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Nakano Hajime
Nunomura Masataka
Ooe Masayuki
Tsumaru Yoshiko
Ueno Takumi
Antonelli, Terry Stout & Kraus, LLP.
Chu John S
Hitachi Chemical Dupont Microsystems L.L.C.
Hitachi Chemical Dupont Microsystems Ltd.
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