Photosensitive polyimide precursor composition with photoacid ge

Details Photosensitive polyimide precursor composition with photoacid ge Photosensitive polyimide precursor composition with photoacid ge

1994-05-27

1995-09-12

Berman, Susan W.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

522 31, 522 52, 522 57, 522148, 522164, G03F 7075, C08G 7310

Patent

active

054495881

ABSTRACT:
A photosensitive resin composition containing 0.5 to 15 parts by weight of a compound generating an acid by light irradiation in 100 parts by weight of a polyamic acid amide having an alkoxysilane having a specified structure at its terminals are provided,

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Buhr et al, "Non-ionic Photogenerating Compounds", Polymeric Materials: Science and Engineering vol. 61, pp. 269-277, Sep. 1989.

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