Photosensitive element, method for forming resist pattern,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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Details

C430S281100, C430S285100, C430S325000, C430S311000, C430S313000, C430S314000, C430S315000, C430S319000

Reexamination Certificate

active

07078151

ABSTRACT:
A photosensitive element comprising a support film and a photosensitive resin layer formed on the support film is provided, wherein the support film is a multilayer support film comprising at least three layers; and wherein the photosensitive resin layer comprises a photosensitive resin composition comprising (A) a binder polymer, (B) a photopolymerizable compound having at least one polymerizable ethylenically unsaturated group within a molecule, and (C) a photopolymerization initiator. Also provided are a method of forming a resist pattern comprising the steps of laminating such a photosensitive element onto a circuit-forming substrate such that the photosensitive resin layer comes into close contact therewith; forming an exposure part by irradiating a predetermined part of the photosensitive resin layer with an active light beam; and then eliminating a part other than the exposure part; and a method of making a printed circuit board comprising the step of etching or plating the circuit-forming substrate formed with a resist pattern by this method of forming a resist pattern.

REFERENCES:
patent: 4629680 (1986-12-01), Iwasaki et al.
patent: 63-200155 (1988-08-01), None
patent: 04-248843 (1992-09-01), None
patent: 06-287288 (1994-10-01), None
patent: 8-87106 (1996-04-01), None
patent: 09-211851 (1997-08-01), None
patent: 2982311 (1999-09-01), None
patent: 2000-214583 (2000-08-01), None
patent: 2001-005178 (2001-01-01), None
DERWENT abstract for JP 2000-214583 (Ishikawa et al).
Machine-Assisted English translation for the claims of JP 2000-214583 (Ishikawa et al) provided by JPO.
DERWENT abstract for JP 8-87106 (Tanizaki et al).
JPO abstract for JP 8-87106 (Tanizaki et al). DERWENT abstract for JP 63-200155 (Takeuchi et al).
English translation of JP 2000-214583 (Ishikawa et al), provided by PTO.
English translation of JP 63-200155(Takeuchi et al), provided by PTO.
Machine-assisted English translation of JP 06-287288 (Oosaki et al), provided by JPO.
English translation of JP 8-87106 (Tanizaki et al), provided by PTO.
Copy of Notice of Rejection, dispatched Jun. 29, 2005, from the Korean Patent Office regarding Korean Patent Application No. 10-2003-7003987, 3 pages.
Machine English translation of Japanese Patent 2,982,311, obtained from www4.ipdl.ncipi.go.jp on Sep. 26, 2005, 20 pages.

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