Photosensitive composition, compound used for photosensitive...

Details Photosensitive composition, compound used for photosensitive... Photosensitive composition, compound used for photosensitive...

2011-08-23

2011-08-23

Lee, Sin J. (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S910000, C430S919000, C430S921000, C430S925000, C430S945000

Reexamination Certificate

active

08003294

ABSTRACT:
A photosensitive composition comprises: (A) a compound capable of generating an acid represented by formula (I) upon irradiation with actinic ray or radiation; and (B) a resin that decomposes by the action of an acid to its increase solubility in an alkali developerwherein Ra represents an alkyl group substituted with a fluorine atom, or an aryl group substituted with a fluorine atom or a group having a fluorine atom; Rb represents an alkyl group not substituted with a fluorine atom on α-position of the alkyl group, or an aryl group not substituted with a fluorine atom or a group having a fluorine atom.

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